Piezo Motor Solutions for Automation
& Precision Motion Control


High Speed Ultrasonic Piezo Linear Motor Drive	Stick-Slip (Inertia) Piezo Motor Principle	Low-Profile Rotary Piezo Motor Stage	PiezoWalk^® Motors Force + Precision

Piezo motors are based on the piezoelectric effect. These compact, energy-efficient mechatronic mechanisms can be employed in precision motion control, replacing electrodynamic motors.

PI currently manufactures several basic types of piezoelectric motors: Ultrasonic motors (resonant motors), piezo stepper motors (PiezoWalk^®) and intertial motors. All three are self-clamping at rest and basically provide unlimited travel, yet they are very different in their design, specifications and performance.

Ultrasonic resonant motors (PILine^®) are characterized by very high acceleration and speed to 800 mm/sec and feature a compact and relatively simple design.

Piezo-Walk motors (piezo stepping motors) can achieve much higher forces and picometer range resolution but are not as fast.

Piezo Stick-Slip motors (piezo inertial motors) are somewhat in between the ultrasonic motors and stepping motors. They are usually driven in step mode and PI motors run quietly at ulrasonic frequencies, however non-resonant. Read Stick-Slip Performance Article.

Flexure type piezo linear actuators are best used for smaller ranges but offer extremely fast response to microseconds.

Other Linear Motors based Magnetic Drive Technologies are also available for automation purposes.

All piezo motors and actuators are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry.

More Information and Links to Applications...

Piezo Motor Catalog
    Stick-Slip, Ultrasonic and Stepping Piezo Motors,
     with Introduction
Positioners with Ultrasonic Motors (PDF)
Piezo Motor White Papers

Nanopositioning Flexure Piezo Stages
Piezo Stack Actuators & Transducers

PI Piezo Motor Videos
Piezo Motor for OCT Scanner
More Papers and Literature




Stick Slip Piezo Motors / Inertial Motors

	Models*	Description	Force [N]	Travel [mm]	Drive

	Q-521 Piezo Motor Datasheet	Compact Positioning Stage, self locking, based on the stick-slip effect, Vacuum Option More Info: Small Stages with Piezo Inertia Motors	1	12, 22, 32	PIShift Inertial Stick-Slip motor

	Q-632 Piezo Motor Datasheet	Mini Rotation Stage, Stick-Slip Piezo Motor More Info: Compact Piezo Rotary Motor Stages	-	Diam: 30	PIShift Inertial Stick-Slip motor

	N-470 Piezo Motor Datasheet	Compact Piezo-Mike Screw Actuator, Self Locking, Based on Stick-Slip Effect, Vacuum Option More Info: Piezo Ratchet Motors	22	7.5, 13, 26	PIShift Inertial Stick-Slip motor

	N-422 Piezo Motor Datasheet	Compact OEM Linear Motor Actuators, Self Locking, Based on Stick-Slip Effect, Vacuum Option More Info: Piezo Linear Motor Actuators	10	40	PIShift Inertial Stick-Slip motor


PiezoWalk Linear Motors (Piezo-Step Motors)


High-Resolution Nanopositioning Motors

	Models*	Description	Load Capacity [kg]	Travel [mm]	Drive

	N-381 Piezo Motor Datasheet	NEXACT^® linear actuator, nanomanipulator, piezo stepper, self locking at rest More Information on PiezoWalk Linear Motors	1	30	NEXACT® Piezo-Walk^® linear motor

	N-310 Piezo Motor Datasheet	PiezoWalk NEXACT^® Ultra-compact nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest. More Info: PiezoWalk Linear Motors	1	10 to 125	NEXACT® Piezo-Walk^® linear motor

	N-111 Piezo Motor Datasheet	NEXLINE^® PiezoWalk^® motor nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest. More Info: High Force PiezoWalk Linear Motors	7	10	NEXLINE^® Piezo-Walk^® linear motor

	N-216 Piezo Motor Datasheet	NEXLINE^® PiezoWalk^® high-load linear motor / nanopositioning actuator, subnanometer resolution, self locking at rest. More Info: High-Load PiezoWalk Linear Motors	80	20	NEXLINE^® Piezo-Walk^® linear motor

	N-565 Piezo Motor Datasheet	Miniature Piezo Motor Positioner, piezo walk® drive, self locking at rest More Info: Piezo Motor Linear Stages	2	13 to 52	NEXACT® Piezo-Walk^® linear motor

	N-725 Piezo Motor Datasheet	Fast Focus Z-Drive with NEXACT® Linear Piezo Motor, self locking at rest More Info: Fast Piezo Focus Motors	1	2	NEXACT® Piezo-Walk^® linear motor

	N-515 Piezo Motor Datasheet	Non-Magnetic Piezo Hexapod Precision Positioning System More Information on Mult-Axis Positioners	50	10 mm Linear, 6° Rotation	NEXLINE® Piezo-Walk^® Linear Motor

	E-712 Piezo Motor Controller Datasheet	Piezocontroller for NEXLINE^® nano-drive, 32-bit digital filters, 24-bit DAC resolution More Info: PiezoWalk Motor Controllers

	E-861 Piezo Motor Controller Datasheet	PiezoWalk® Networkable Controller/Driver for NEXACT® Linear Motors and Positioners More Info: PiezoWalk Motor Controllers
Piezo-Walk®Working Principle




Linear Stages with Ultrasonic Piezo Linear Motors



	Models*	Description	Load Capacity [kg]	Travel [mm]	Drive

	U-521 Piezo Motor Datasheet	Smallest piezo motor positioning stage with linear encoder and ultrasonic motor, speed to 250 mm/s, 0.1 µm resolution, self locking at rest XY combinations available Watch Video More Info: Ultrasonic Piezo Motors	0.5	18	PILine® ultrasonic motor

	U-751 Piezo Motor Datasheet	XY piezo motor positioner stage with linear encoder, 0.1 µm resolution, self locking at rest More Information on XY Ultrasonic Piezo Motors	5	25	PILine® ultrasonic piezo motor

	U-780/M-687 Piezo Motor Datasheet	Motorized XY microscope stage with Ultrasonic High Stability Motor. 0.1 µm Linear encoder, self locking at rest More Information: XY Stages with Ultrasonic Piezo Motors	5	185 x 225 mm	PILine® ultrasonic piezo motor


Piezoelectric Rotary Motors / Stages

	Models*	Description	Travel [Deg]	Load Capacity[kg]	Drive

	Rotary Stage Brochure	Ultra-Low Profile piezo motor rotation stage, ultasonic motors, self locking at rest More Info: Piezo Rotary Motor Stages Video: Rotary Stage Drive Principle More on Rotation Stages	Unlimited	1	PILine® ultrasonic piezo motor
PILine® Ultrasonic Piezomotors Working Principle


Ultrasonic Piezo Motor Controllers/Drivers for PILine^® Motors

	Models*	Description	Channels	Outputs for Motor Types	Interfaces

	C-877 Piezo Motor Controller Datasheet	Mini Controller for PILine® Ultrasonic Piezomotors More Info: Ultrasonic Piezo Motor Controllers	1	PILine^® Piezomotor	Analog -10V to +10V

	C-877 Piezo Motor Controller Datasheet	High-speed, closed-loop controller/driver for closed-loop PILine^® piezomotors. More Info: Ultrasonic Piezo Motor Controllers	1, 2	PILine^® Piezomotor	USB, RS-232
* Ask about custom designs!