| Piezo Motor Solutions for Automation & Ultra-Precision Motion Control |
 Piezo Motor Brochure PDF Download
Piezo Motor White Papers |
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Nanopositioning Flexure Piezo Stages
Piezo Stack Actuators & Transducers
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High Speed Ultrasonic Piezo Linear Motor Drive |
Low Profile Piezo Motor Stage |
Ultra Precision (Sub-nm) PiezoWalk® High Force Piezomotors |
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| PI currently manufactures two basic types of piezoelectric linear motors: Ultrasonic linear motors (resonant motors), and stepper motors (PiezoWalk®). Both offer an auto-locking feature and can basically provide unlimited travel, yet they are very different in their design, specifications and performance.
PILine® ultrasonic resonant motors are characterized by very high speed to 800 mm/s and a very compact and simple design (systems down to 8 mm are available). NEXLINE® & NEXACT® piezo step linear motors can achieve much higher forces and picometer range resolution but are not as fast. Flexure type piezo linear actuators are best used for smaller ranges but offer extremely fast response to microseconds. | All piezo motors and actuators are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry. More Information and Links to Applications... | |
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| Piezo Linear Motor Selection Guide: PiezoWalk Motors (Piezo-Step Motors) |
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| NEXLINE® & NEXACT® Ultra-High-Resolution Nanopositioning Drives | |||||
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Travel [mm] | Drive | |
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N-381 Datasheet |
NEXACT® linear actuator, nanomanipulator, piezo stepper, self locking at rest Talk to an Engineer |
1 | 30 | NEXACT® Piezo-Walk® linear motor |
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N-310 Datasheet |
PiezoWalk NEXACT® Ultra-compact nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest. Talk to an Engineer |
1 | 20 | NEXACT® Piezo-Walk® linear motor |
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N-111 Datasheet |
NEXLINE® PiezoWalk® motor nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest.
Talk to an Engineer |
7 | 10 | NEXLINE® Piezo-Walk® linear motor |
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N-216 Datasheet |
NEXLINE® PiezoWalk® high-load linear motor / nanopositioning actuator, subnanometer resolution, self locking at rest. Talk to an Engineer |
80 | 20 | NEXLINE® Piezo-Walk® linear motor |
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N-661 Datasheet |
Miniature Piezo Motor Positioner, piezo walk® drive, self locking at rest Talk to an Engineer |
2 | 20 | NEXACT® Piezo-Walk® linear motor |
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N-725 Datasheet |
Fast Focus Z-Drive with NEXACT® Linear Piezo Motor, self locking at rest Talk to an Engineer |
1 | 1 mm / 1000µm | NEXACT® Piezo-Walk® linear motor |
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N-515 Datasheet |
Non-Magnetic Piezo Hexapod Precision Positioning System Talk to an Engineer |
50 | 10 mm Linear, 6° Rotation |
NEXLINE® Piezo-Walk® Linear Motor |
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E-755 Datasheet |
Piezocontroller for NEXLINE® nano-drive, 32-bit digital filters, 24-bit DAC resolution Talk to an Engineer |
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E-861 Datasheet |
PiezoWalk® Networkable Controller/Driver for NEXACT® Linear Motors and Positioners Talk to an Engineer |
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 Piezo-Walk®Working Principle | |||||
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| Piezo Linear Motor Selection Guide: Ultrasonic Piezo Motors |
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| Models* | Description | Load Capacity [kg] |
Travel [mm] | Drive | |
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U-164 Datasheet |
Fast, Compact OEM Ultrasonic Piezo Motor, self locking at rest Talk to an Engineer |
- | - | PILine® ultrasonic motor |
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P-661 Datasheet |
Ultrasonic OEM piezo motor, small, light, very fast, self locking at rest Talk to an Engineer |
- | - | PILine® ultrasonic motor |
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M-272 Datasheet |
Ultrasonic Linear Shaft Motor / Pusher for Automation, self locking at rest Talk to an Engineer See M-272 Video |
8 N Force | 50 mm Travel, 200 mm/sec | PILine® ultrasonic linear motor |
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M-674 Datasheet |
RodDrive Ultrasonic Piezo Linear Motor Pusher for OEMs Talk to an Engineer |
6 N Force | 100 | PILine® ultrasonic motor |
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| Linear Stages with Ultrasonic Piezo Linear Motors | |||||
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| Models* | Description | Load Capacity [kg] |
Travel [mm] | Drive | |
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M-661, M-662 Datasheet |
Miniature piezo motor positioner stages lineear motor, open-loop, speeds to 500 mm/s, 0.1 µm resolution, self locking at rest Talk to an Engineer |
0.5 | 18, 20 | PILine® ultrasonic motor |
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M-663 Datasheet |
Smallest piezo motor positioning stage with linear encoder and ultrasonic motor, speed to 400 mm/s, 0.1 µm resolution, self locking at rest XY combinations available Talk to an Engineer |
0.5 | 20 | PILine® ultrasonic motor |
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M-664 Datasheet |
M-664 low-profile, piezo motor positioner stage with linear encoder, self locking at rest Talk to an Engineer |
0.5 | 25 | PILine® ultrasonic piezo motor |
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M-683 Datasheet |
M-683 precision piezo motor positioner stage Talk to an Engineer |
5 | 50 | PILine® ultrasonic motor |
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M-686 Datasheet |
XY piezo motor positioner stage with linear encoder, 0.1 µm resolution, self locking at rest Talk to an Engineer |
5 | 25 | PILine® ultrasonic piezo motor |
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M-686K Datasheet |
Ultrasonic piezo motor XY microscope stages. 0.1 µm Linear encoder, self locking at rest |
5 | 185 x 225 mm | PILine® ultrasonic piezo motor |
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M-545.2U Datasheet |
XY linear piezo motor positioner stage with linear encoder, 0.5 µm resolution, self locking at rest |
5 | 25 x 25 | PILine® ultrasonic piezo motor |
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| Piezoelectric Rotary Motors | |||||
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M-660
Datasheet |
Ultra-Low Profile piezo motor rotation stage, ultasonic motors, self locking at rest See M-660 Video Talk to an Engineer
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Unlimited | 1 | PILine® ultrasonic piezo motor |
 PILine® Ultrasonic Piezomotors Working Principle | |||||
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| Ultrasonic Piezo Motor Controllers/Drivers for PILine® Motors | |||||
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| Models* | Description | Channels | Outputs for Motor Types |
Interfaces | |
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C-184 - C-185 Datasheet |
OEM Boards and Stand-Alone Units for Ultrasonic Piezomotors Talk to an Engineer |
1 | PILine® Piezomotor |
analog, -10V to +10V |
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C-170 Datasheet |
Redstone open-loop piezo motor controller for ultrasonic piezo linear motors. Talk to an Engineer |
1, 2 | PILine® Piezomotor |
RS-232 |
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C-867 Datasheet |
High-speed, closed-loop controller/driver for closed-loop PILine® piezomotors. Talk to an Engineer |
1, 2 | PILine® Piezomotor |
USB, RS-232 |
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| Watch Videos on NEXLINE® PILIne® Products |
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positioning stage, animation. |
M-660 Ultra-Low Profile Ultrasonic Rotation Stage |
| Animated 3D Mode of an Ultrasonic Rotary Piezo Motor, Measured with a Scanning Vibrometer |
| Ultrasonic Motors, Actuators and Stages | ||||||||
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| Ultrasonic Piezo Linear Motors | Ultrasonic Piezo Linear Motors / Actuators |
Linear Stages w/ Ultrasonic Motors | XY-Piezomotor Stages |
High-Speed Rotation Stage |
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| Piezo-Walk (Steppers), Flexure Actuators & Piezo Stacks | |||||||||
| Piezo Steppers | Controllers | Flexure Actuators | Piezo Benders | PICMA® Piezo Stacks | |||||
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