High Speed Ultrasonic Piezo Linear Motor Drive |
Low Profile Piezo Motor Stage |
Ultra Precision (Sub-nm) PiezoWalk® High Force Piezomotors |
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PI currently manufactures three basic types of piezoelectric motors: Ultrasonic motors (resonant motors), stepper motors (PiezoWalk®) and intertial motors. All three are self-clamping at rest and basically provide unlimited travel, yet they are very different in their design, specifications and performance.
PILine® ultrasonic resonant motors are characterized by very high acceleration and speed to 800 mm/sec and feature a compact and relatively simple design. Piezo-Walk type motors (piezo stepping motors) can achieve much higher forces and picometer range resolution but are not as fast. Piezo Stick-Slip motors (piezo inertial motors) are somewhat in between the ultrasonic motors and stepping motors. They are usually driven in step mode and PI motors run quietly at ulrasonic frequencies, however non-resonant. Flexure type piezo linear actuators are best used for smaller ranges but offer extremely fast response to microseconds. | All piezo motors and actuators are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry. More Information and Links to Applications... | |
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Stick Slip Piezo Motors / Inertial Motors:
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| Models* | Description | Force [N] |
Travel [mm] | Drive | |
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N-422 Datasheet |
Compact OEM Linear Motor Actuators, self locking, based on the stick-slip effect Questions / RFQ Ask a PI Engineer! |
10 | 40 | PIShift Inertial Stick-Slip motor |
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| PiezoWalk Linear Motors (Piezo-Step Motors) |
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| High-Resolution Nanopositioning Motors | |||||
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| Models* | Description | Load Capacity [kg] |
Travel [mm] |
Drive | |
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N-381 Datasheet |
NEXACT® linear actuator, nanomanipulator, piezo stepper, self locking at rest Questions / RFQ Ask a PI Engineer! |
1 | 30 | NEXACT® Piezo-Walk® linear motor |
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N-310 Datasheet |
PiezoWalk NEXACT® Ultra-compact nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest. Questions / RFQ Ask a PI Engineer! |
1 | 20 | NEXACT® Piezo-Walk® linear motor |
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N-111 Datasheet |
NEXLINE® PiezoWalk® motor nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest.
Questions / RFQ Ask a PI Engineer! |
7 | 10 | NEXLINE® Piezo-Walk® linear motor |
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N-216 Datasheet |
NEXLINE® PiezoWalk® high-load linear motor / nanopositioning actuator, subnanometer resolution, self locking at rest. Questions / RFQ Ask a PI Engineer! |
80 | 20 | NEXLINE® Piezo-Walk® linear motor |
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N-664 Datasheet |
Miniature Piezo Motor Positioner, piezo walk® drive, self locking at rest Questions / RFQ Ask a PI Engineer! |
2 | 30 | NEXACT® Piezo-Walk® linear motor |
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N-725 Datasheet |
Fast Focus Z-Drive with NEXACT® Linear Piezo Motor, self locking at rest Questions / RFQ Ask a PI Engineer! |
1 | 1 mm / 1000µm | NEXACT® Piezo-Walk® linear motor |
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N-515 Datasheet |
Non-Magnetic Piezo Hexapod Precision Positioning System Questions / RFQ Ask a PI Engineer! |
50 | 10 mm Linear, 6° Rotation |
NEXLINE® Piezo-Walk® Linear Motor |
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E-755 Datasheet |
Piezocontroller for NEXLINE® nano-drive, 32-bit digital filters, 24-bit DAC resolution Questions / RFQ Ask a PI Engineer! |
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E-861 Datasheet |
PiezoWalk® Networkable Controller/Driver for NEXACT® Linear Motors and Positioners Questions / RFQ Ask a PI Engineer! |
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  Piezo-Walk®Working Principle | |||||
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Ultrasonic Piezo Motor Selection Guide: | |||||
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| Models* | Description | Load Capacity [kg] |
Travel [mm] | Drive | |
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U-164 Datasheet |
Fast, Compact OEM Ultrasonic Piezo Motor, self locking at rest Questions / RFQ Ask a PI Engineer! |
- | - | PILine® ultrasonic motor |
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P-661 Datasheet |
Ultrasonic OEM piezo motor, small, light, very fast, self locking at rest Questions / RFQ Ask a PI Engineer! |
- | - | PILine® ultrasonic motor |
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M-272 Datasheet |
Ultrasonic Linear Shaft Motor / Pusher for Automation, self locking at rest Questions / RFQ Ask a PI Engineer! See M-272 Video |
8 N Force | 50 mm Travel, 200 mm/sec | PILine® ultrasonic linear motor |
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U-264 Datasheet |
RodDrive Ultrasonic Piezo Linear Motor Pusher for OEMs Questions / RFQ Ask a PI Engineer! |
To 15 N Force | 150 | PILine® ultrasonic motor |
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| Linear Stages with Ultrasonic Piezo Linear Motors | |||||
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| Models* | Description | Load Capacity [kg] |
Travel [mm] | Drive | |
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M-661, M-662 Datasheet |
Miniature piezo motor positioner stages lineear motor, open-loop, speeds to 500 mm/s, 0.1 µm resolution, self locking at rest Questions / RFQ Ask a PI Engineer! |
0.5 | 18, 20 | PILine® ultrasonic motor |
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M-663 Datasheet |
Smallest piezo motor positioning stage with linear encoder and ultrasonic motor, speed to 400 mm/s, 0.1 µm resolution, self locking at rest XY combinations available Questions / RFQ Ask a PI Engineer! |
0.5 | 20 | PILine® ultrasonic motor |
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M-664 Datasheet |
M-664 low-profile, piezo motor positioner stage with linear encoder, self locking at rest Questions / RFQ Ask a PI Engineer! |
0.5 | 25 | PILine® ultrasonic piezo motor |
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M-683 Datasheet |
M-683 precision piezo motor positioner stage Questions / RFQ Ask a PI Engineer! |
5 | 50 | PILine® ultrasonic motor |
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M-686 Datasheet |
XY piezo motor positioner stage with linear encoder, 0.1 µm resolution, self locking at rest Questions / RFQ Ask a PI Engineer! |
5 | 25 | PILine® ultrasonic piezo motor |
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M-687 Datasheet |
Motorized XY microscope stage with Ultrasonic High Stability Motor. 0.1 µm Linear encoder, self locking at rest Questions / RFQ Ask a PI Engineer! |
5 | 185 x 225 mm | PILine® ultrasonic piezo motor |
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M-545.2U Datasheet |
XY linear piezo motor positioner stage with linear encoder, 0.5 µm resolution, self locking at rest |
5 | 25 x 25 | PILine® ultrasonic piezo motor |
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| Piezoelectric Rotary Motors | |||||
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| Models* | Description | Travel [Deg] | Load Capacity[kg] | Drive | |
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M-660 Datasheet |
Ultra-Low Profile piezo motor rotation stage, ultasonic motors, self locking at rest Questions / RFQ Ask a PI Engineer!
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PILine® ultrasonic piezo motor |
 PILine® Ultrasonic Piezomotors Working Principle | |||||
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| Ultrasonic Piezo Motor Controllers/Drivers for PILine® Motors | |||||
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| Models* | Description | Channels | Outputs for Motor Types |
Interfaces | |
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C-184 - C-185 Datasheet |
OEM Boards and Stand-Alone Units for Ultrasonic Piezomotors Questions / RFQ Ask a PI Engineer! |
1 | PILine® Piezomotor |
Analog, -10V to +10V |
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C-872 Datasheet |
Driver for all PILine® Ultrasonic Piezomotors, analog control input, minimum heat generation Questions / RFQ Ask a PI Engineer! |
1 | PILine® Piezomotor |
Analog -10V to +10V |
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C-867 Datasheet |
High-speed, closed-loop controller/driver for closed-loop PILine® piezomotors. Questions / RFQ Ask a PI Engineer! |
1, 2 | PILine® Piezomotor |
USB, RS-232 |
* Ask about custom designs! | |||||
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Complete Piezo Motor Catalog (PDF)
Piezo Motor White Papers |
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Nanopositioning Flexure Piezo Stages
Piezo Stack Actuators & Transducers
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| Animated 3D Mode of an Ultrasonic Rotary Piezo Motor, Measured with a Scanning Vibrometer |
More Papers and Literature |
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Ultrasonic Motors, Actuators and Stages | ||||||||
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| Ultrasonic Piezo Linear Motors | Ultrasonic Piezo Linear Motors / Actuators |
Linear Stages w/ Ultrasonic Motors | XY-Piezomotor Stages |
High-Speed Rotation Stage |
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Piezo-Walk (Steppers), Flexure Actuators & Piezo Stacks | |||||||||
| Piezo Steppers | Controllers | Flexure Actuators | Piezo Benders | PICMA® Piezo Stacks | |||||
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