Piezo Motor Solutions for Automation
& Precision Motion Control


High Speed Ultrasonic Piezo Linear Motor Drive
Low-Profile Rotary Piezo Motor Stage
Low Profile Piezo Motor Stage

Ultra Precision (Sub-nm) PiezoWalk® High Force Piezomotors
PI currently manufactures three basic types of piezoelectric motors: Ultrasonic motors (resonant motors), stepper motors (PiezoWalk®) and intertial motors. All three are self-clamping at rest and basically provide unlimited travel, yet they are very different in their design, specifications and performance.

PILine® ultrasonic resonant motors are characterized by very high acceleration and speed to 800 mm/sec and feature a compact and relatively simple design.

Piezo-Walk type motors (piezo stepping motors) can achieve much higher forces and picometer range resolution but are not as fast.

Piezo Stick-Slip motors (piezo inertial motors) are somewhat in between the ultrasonic motors and stepping motors. They are usually driven in step mode and PI motors run quietly at ulrasonic frequencies, however non-resonant.

Flexure type piezo linear actuators are best used for smaller ranges but offer extremely fast response to microseconds.

All piezo motors and actuators are in principle nonmagnetic and vacuum-compatible, a perfect match for many applications in the semiconductor industry.

More Information and Links to Applications...

Piezo Motor Catalog
    Stick-Slip, Ultrasonic and Stepping Piezo Motors,
     with Introduction

Positioners with Ultrasonic Motors (PDF)       
Piezo Motor White Papers

Nanopositioning Flexure Piezo Stages     
Piezo Stack Actuators & Transducers

PI Piezo Motor Videos
Piezo Motor for OCT Scanner
More Papers and Literature




  Stick Slip Piezo Motors / Inertial Motors:

Models* Description Force
[N]
Travel [mm] Drive
Stick Slip Motor LPS-22
Brochure
Compact Positioning Stage, self locking, based on the stick-slip effect, Vacuum Option
Specs, Data, Request Quote, Ask Questions
3 6.5, 13, 26 PIShift
Inertial Stick-Slip
motor
Stick Slip Motor RPS
Brochure
Compact Rotary Stage, Self Locking, Based on Stick-Slip Effect, Vacuum Option
Specs, Data, Request Quote, Ask Questions
- Diam: 14, 22, 32 PIShift
Inertial Stick-Slip
motor
Stick Slip Motor N-470
Datasheet
Compact Piezo-Mike Screw Actuator, Self Locking, Based on Stick-Slip Effect, Vacuum Option
Specs, Data, Request Quote, Ask Questions
22 7.5, 13, 26 PIShift
Inertial Stick-Slip
motor
Stick Slip Motor N-422
Datasheet
Compact OEM Linear Motor Actuators, Self Locking, Based on Stick-Slip Effect, Vacuum Option
Specs, Data, Request Quote, Ask Questions
10 40 PIShift
Inertial Stick-Slip
motor
PiezoWalk Linear Motors (Piezo-Step Motors)
High-Resolution Nanopositioning Motors
Models* Description Load
Capacity
[kg]
Travel
[mm]
Drive
Piezo Motor N-381 N-381
Datasheet
NEXACT® linear actuator, nanomanipulator, piezo stepper, self locking at rest
Specs, Data, Request Quote, Ask Questions
1 30 NEXACT® Piezo-Walk®
linear motor
Piezo Motor-N-310 N-310
Datasheet
PiezoWalk NEXACT® Ultra-compact nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest.
Specs, Data, Request Quote, Ask Questions
1 20 NEXACT® Piezo-Walk®
linear motor
Piezo Motor-N-111 N-111
Datasheet
NEXLINE® PiezoWalk® motor nanopositioning linear motor / actuator, subnanometer resolution, self locking at rest.
Specs, Data, Request Quote, Ask Questions
7 10 NEXLINE® Piezo-Walk®
linear motor
Piezo Motor_N-216 N-216
Datasheet
NEXLINE® PiezoWalk® high-load linear motor / nanopositioning actuator, subnanometer resolution, self locking at rest.
Specs, Data, Request Quote, Ask Questions
80 20 NEXLINE® Piezo-Walk®
linear motor
Piezo Motor_N-664 N-664
Datasheet
Miniature Piezo Motor Positioner, piezo walk® drive, self locking at rest
Specs, Data, Request Quote, Ask Questions
2 30 NEXACT® Piezo-Walk®
linear motor
Piezo Motor_N-725 N-725
Datasheet
Fast Focus Z-Drive with NEXACT® Linear Piezo Motor, self locking at rest
Specs, Data, Request Quote, Ask Questions
1 1 mm / 1000µm NEXACT® Piezo-Walk®
linear motor
Piezo Motor_N-515.KNPH N-515
Datasheet
Non-Magnetic Piezo Hexapod Precision Positioning System
Specs, Data, Request Quote, Ask Questions
50 10 mm Linear,
6° Rotation
NEXLINE® Piezo-Walk® Linear Motor
Piezo Motor_E-755 NEXLINE Controller E-755
Datasheet
Piezocontroller for NEXLINE® nano-drive, 32-bit digital filters, 24-bit DAC resolution
Specs, Data, Request Quote, Ask Questions
Piezo Motor_E-861 NEXACT Controller E-861
Datasheet
PiezoWalk® Networkable Controller/Driver for NEXACT® Linear Motors and Positioners
Specs, Data, Request Quote, Ask Questions
   Piezo-Walk®Working Principle

Ultrasonic Piezo Motor Pushers / Linear Actuators
Models* Description Load
Capacity [kg]
Travel [mm] Drive
Piezo Motor_Linear Shaft Motor, Ultrasonic M-272
Datasheet
Ultrasonic Linear Shaft Motor / Pusher for Automation, self locking at rest
Specs, Data, Request Quote, Ask Questions
See M-272 Video
8 N Force 50 mm Travel, 200 mm/sec PILine®
ultrasonic
linear motor
Piezo Motor_M-674 U-264
Datasheet
RodDrive Ultrasonic Piezo Linear Motor Pusher for OEMs
Specs, Data, Request Quote, Ask Questions
To 15 N Force 150 PILine®
ultrasonic
motor
Piezo Motor_U-164 U-164
Datasheet
Fast, Compact OEM Ultrasonic Piezo Motor, self locking at rest
Specs, Data, Request Quote, Ask Questions
- - PILine®
ultrasonic
motor
Linear Stages with Ultrasonic Piezo Linear Motors
Models* Description Load
Capacity [kg]
Travel [mm] Drive
Piezo Motor_M-663 M-663
Datasheet
Smallest piezo motor positioning stage with linear encoder and
ultrasonic motor, speed
to 250 mm/s, 0.1 µm resolution, self locking at rest
XY combinations available
Specs, Data, Request Quote, Ask Questions
0.5 18 PILine®
ultrasonic
motor
Piezo Motor_M-664 M-664
Datasheet
M-664 low-profile, piezo motor positioner stage with linear encoder, self locking at rest
Specs, Data, Request Quote, Ask Questions
0.5 25 PILine®
ultrasonic
piezo motor
Piezo Motor_M-683 M-683
Datasheet
M-683 precision piezo motor positioner stage
Specs, Data, Request Quote, Ask Questions
5 50 PILine®
ultrasonic
motor
Piezo Motor_M-686 M-686
Datasheet
XY piezo motor positioner stage with linear
encoder, 0.1 µm resolution, self locking at rest
Specs, Data, Request Quote, Ask Questions
5 25 PILine®
ultrasonic
piezo motor
Piezo Motor_M-686K M-687
Datasheet
Motorized XY microscope stage with Ultrasonic High Stability Motor. 0.1 µm Linear encoder, self locking at rest
Specs, Data, Request Quote, Ask Questions
5 185 x 225 mm PILine®
ultrasonic
piezo motor
Piezoelectric Rotary Motors / Stages
Models* Description Travel [Deg] Load Capacity[kg] Drive
Piezo Motor_M-660 Rotary Motor


M-660
Datasheet


Ultra-Low Profile piezo motor rotation stage, ultasonic motors, self locking at rest
Specs, Data, Request Quote, Ask Questions

 

See M-660 Video

More on Rotation Stages



Unlimited


1


PILine®
ultrasonic
piezo motor
  PILine® Ultrasonic Piezomotors Working Principle
Ultrasonic Piezo Motor Controllers/Drivers for PILine® Motors
Models* Description Channels Outputs for
Motor Types
Interfaces
Piezo Motor_C-872 C-872
Datasheet
Driver for all PILine® Ultrasonic Piezomotors, analog control input, minimum heat generation
Specs, Data, Request Quote, Ask Questions
1 PILine®
Piezomotor
Analog
-10V to +10V
Piezo Motor_C-867 C-867
Datasheet
High-speed, closed-loop controller/driver
for closed-loop PILine® piezomotors.
Specs, Data, Request Quote, Ask Questions
1, 2 PILine®
Piezomotor
USB, RS-232

* Ask about custom designs!


Complete Piezo Motor Catalog (PDF)        Piezo Motor White Papers
Nanopositioning Flexure Piezo Stages      Piezo Stack Actuators & Transducers



M-660 Ultra-Low Profile Ultrasonic Rotation Stage






Animated 3D Mode of an Ultrasonic Rotary Piezo Motor, Measured with a Scanning Vibrometer





More Papers and Literature



Piezo motors and actuators Streamlining
     medical device performance

Piezo Motor Brochures: Ultrasonic High Speed Motors for
     Automation PiezoWalk® Piezo Motors for Ultra-Precision
     Motion Control

White Papers on Ultrasonic Piezo Motors: Ultrasonic
     Piezo Rotary Motors and Linear Piezo Motors

Piezo-Based, Long-Travel Actuators For Special
     Environmental Conditions

Survey of the Various Operating Principles of Ultrasonic
     Piezomotors

Miniature Piezo Motor for Medical Device Manufacturers
High Precision Piezo Linear Motor for Semiconductor
     Applications

New Linear Ultrasonic Micromotor for Precision Mechatronic
     Systems

More on Linear Ultrasonic Micromotor for Precision
     Mechatronic Systems

Piezoelectric Motor Basics on Wikipedia
Piezo Motor for OCT Scanner
Nanometer Precise Hybrid Actuator in Positioning Mechanism
     with Long Travel Range

Test Stand for Analyzing New Types of High-Performance
     Ultrasonic Piezomotor Drives

Hybrid Piezo Motor Actuators
PI Piezo Motor News at the ACTUATOR 2006 Conference